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I get segmentation faults trying to run rgssuperrmf. What am I doing wrong?

Actually nothing.

rgssuperrmf, a task introduced in SAS 6.5, combines a list of spectrum files (and background spectrum files) to create a combined spectrum file and combined background spectrum file, creating a single response matrix.

This task makes use normally of huge amounts of memory. This can lead machines with less than 1 GB memory to crash. An alternative to this package is given by rgscombine, which can be used for the same general purpose of combining different RGS exposures.